화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.6, 2975-2977, 1999
Extreme ultraviolet lithography at Carl Zeiss: Manufacturing and metrology of aspheric surfaces with angstrom accuracy
Experiments were carried out to manufacture aspheric surfaces to extreme ultraviolet (EUV) standards, within the European Project extreme UV concept lithography development system (EUCLIDES). Results of the fabrication of mirror 2 of the Sandia National Laboratory 5 x ring-field system will be discussed. A residual rms surface error of 0.14 nm and a roughness of 0.2 nm have been achieved. These results are very promising for the realization of future EUV systems.