Specular reflection of neutrons has been used to characterize the structure of single lipid bilayers adsorbed to a planar silicon surface from aqueous solution. We used a novel experimental setup which significantly decreased the incoherent background scattering and allowed us to measure neutron reflectivities as low as 5 x 10(-7). Thicknesses and neutron scattering length densities were determined by a fitting procedure using (i) randomly generated smooth functions represented by parametric B-splines and (ii) stepped functions based on the theoretical lipid composition. The size of lipid domains at the surface and the degree of surface coverage were determined by atomic force microscopy. Chain-protonated and -deuterated dipalmitoylphosphatidylcholine (DPPC) bilayers were investigated in (H2O)-H-2 and a mixture of (H2O)-H-2 and H2O which matches the scattering density of silicon. Also, one measurement on a distearoylphosphatidylcholine bilayer which has longer acyl chains was performed for comparison. The lipid adsorbs to the silicon surface as a continuous layer interrupted by irregularly shaped uncovered areas which are 100-500 Angstrom in size. The surface coverage was estimated to be 70 +/- 20%. The reflectivity measurements on DPPC at 60 degrees C show a silicon oxide layer with a thickness of the order of 4 Angstrom, a rough silicon oxide/water layer between silicon oxide and lipid with a thickness between 2 and 8 Angstrom, and a single lipid bilayer. Fitting resolved a central membrane layer with a thickness of 28 +/- 2 Angstrom which represents the lipid hydrocarbon chains. This layer is sandwiched between interface membrane layers of lipid head groups and water which are 11.5 +/- 1 Angstrom in thickness. The angstrom-scale thickness changes of the central membrane layer as a function of the phase state of the lipid and of the length of the hydrocarbon chains are easily detected.