Monolayers that are bonded via a covalent Si-C bond are prepared on a silicon(100) surface by reaction of a 1-alkene with the hydrogen-terminated silicon surface. The monolayers have been analyzed by infrared spectroscopy, X-ray reflectivity, and water contact angle measurements and display a remarkably high thermal stability. The reaction also works well for omega-functionalized 1-alkenes, provided that the functional group is properly protected. After formation of the monolayer, the protecting group can be easily removed without noticeable disturbance of the monolayer integrity, and the now reactive sites at the monolayer can be used for further functionalization, as has been shown in the case of ester-protected alcohol and carboxylic acids. Functional groups that are too close to the alkene moiety interfere with monolayer formation and yield disordered monolayers.