PFA sheets were modified with remote hydrogen plasma, and effects of the modification on the adhesion between copper layer and FEP were investigated. Remote hydrogen plasma treatment for a short time of 30 s is able to make the PFA surface hydrophilic. The remote hydrogen plasma treatment causes defluorination and oxidation of PFA surface. The extent of the defluorination is 42-48%, and the oxidation reaches 9-13% of the total carbon atoms. The modification of the PFA surface by the remote hydrogen plasma is effective in the adhesion to copper metal. The peel strength for the copper metal/PFA system is improved from 0 to 101 mN/5 mm by the surface modification. The failure mode of the copper metal/PFA system is an inner layer of the plasma-treated PFA layer. The remote hydrogen plasma treatment is the preferable pretreatment of the PFA surface for adhesion with copper metal.