화학공학소재연구정보센터
Materials Research Bulletin, Vol.29, No.3, 255-261, 1994
Preparation of Lanthanum Aluminate Thin-Films by a Sol-Gel Procedure Using Alkoxide Precursors
The preparation by a chemical method of thin lanthanum aluminate (LaAlO3) films on substrates of single crystalline silicon and sapphire as well as on optical silica glass substrates has been investigated. A sol-gel procedure is used during which an isopropanol sol of La-isopropoxide and Al-isopropoxide along with acetylacetone as a chelating agent is spin-coated on the substrate. Well crystallized LaAlO3 films are formed on the substrates after heat-treatment of the amorphous gel coatings. These films, having a thickness of about 300 angstrom, are characterized by a very good adhesion to the substrate, the lack of cracks and a very smooth surface.