Films of ZnS and ZnS:Mn 0.1 to 5.0 mu m thick were prepared by the CVD method using new volatile complex compounds belonging to dithiocarbamates and xanthates. Their chemical composition, density, structural and optical properties were studied. It is shown that at relatively low temperatures (T approximate to 220 degrees C) monophase doped ZnS:Mn films can be fabricated with uniform distribution of Mn over the film thickness. Depending on selection of precursors and presence of dopant, ZnS and ZnS:Mn films can be of sphalerite or wurtzite structure. The refractive index of the films was determined at 0.633 and 20.0 mu m wavelength.