Phase pure Ba(Mg(1/3)Tau(2/3))O-3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)(2), and Ta(OC2H5)(5) as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at similar to 600 degrees C. Scanning electron microscopy reveals that the films 0.3 mu m in thickness and approximately 0.1 mu m in grain size were essentially crack-free.