The chemical surface modification of poly(tetrafluoroethylene) (PTFE) film was carried out in hydrazine gas photolyzed with ArF excimer laser irradiation. Hydrophilic surface appeared on PTFE film after the laser treatment. The surface was analyzed with a measurement of water contact angle, X-ray photoelectron spectroscopy, and FTIR spectroscopy (attenuated total reflection). In addition, on the basis of the hydrophilic behavior, we succeeded in the area-selective electroless plating of nickel and copper metal on the chemically modified surface.