The photoaddressed spatial light modulator (PLSM) with thin hydrogenated amorphous silicon carbide photoreceptor alpha-Si1-xCx:H and nematic liquid crystal has been fabricated. The films were prepared by rf plasma decomposition of SiH4 and CH4 gas mixture. They have a high dark resistivity and photosensitivity as a hydrogenated amorphous silicon, but a more transmittance in visible spectrum. The maximum of diffraction efficiency for PLSM was achieved for the write light intensity 40 mu W/cm(2), a resolution on the one half of maximum of diffraction efficiency was 54 mm(-1). The optical response of PLSM was observed in the frequency region from 1 Hz to 100 Hz.