화학공학소재연구정보센터
Particulate Science and Technology, Vol.16, No.4, 281-293, 1998
Experience with and theoretical modelling of particle distributions from a class 10,000 cleanroom
Particle data, engineering layouts, and theoretical modelling are presented for two class 10,000 cleanrooms with class 1,000 mini-environments used for advanced environmental research and development. Particle data generated from strategically selected sample points, is presented for background and controlled upsets in three dimensions in the clean room as well as in the intermediate changing room. The primary source of contamination in the clean room appears to be generated by the personnel. Although an increase in particle numbers is observed with increased traffic in the clean room, control over the environment is maintained by restricting high particle generating activities to within a separate changing room environment. A theoretical model based on application of a Gaudin-Schuhmann Law to the sparse matrices generated by standard industrial sampling methods is presented to show the particle distributions within the areas tested, as well as prediction of particle numbers outside the range sampled. Future work may include the refinement of the model to increase precision and prediction as well as expanding the model to predict particle distributions in three dimensions.