The cationic polymerization initiated by oxoaminium perchlorate groups introduced onto ultrafine silica surface was investigated. The oxoaminium perchlorate groups were successfully introduced by treatment of nitroxyl radicals on silica surface with perchloric acid. The introduction of the nitroxyl radicals was achieved by reaction of 4-hydroxy-2,2,6,6-tetramethyl-piperidinyloxy radical with acid anhydride groups on the surface. The cationic polymerization of isobutyl vinyl ether, N-vinylcarbazole, 2,3-dihydrofuran, and gamma-butyrolactone was initiated by oxoaminium perchlorate groups introduced onto the surface and the corresponding polymers were grafted onto the surface through the propagation of grafted polymer chain from the surface oxoaminium perchlorate groups.