화학공학소재연구정보센터
Polymer Bulletin, Vol.36, No.5, 601-607, 1996
Plasma Polymer Thin-Films of Zinc Phthalocyanines for NO2 Gas Sensor Device
Zinc phthalocyanines without substituent (ZnPc) and with hydroxymethyl (ZnOc-CH2OH), and phthalimidomethyl substituents (ZnPc-CH2N[C(O)](2)Ph) were plasma-polymerized and the application of the deposited plasma polymer films for NO2 gas sensor device has been discussed. The chemical composition of the deposited plasma polymer films was analyzed by electronic spectroscopy and XPS. The electronic and XPS spectra showed that the plasma polymer films possessed the pi-extended electron system and the zinc chelation, although a part of them was degraded by plasma. From the stability of the zinc chelation, the plasma polymer film of ZnPc was chosen as a suitable material for NO2 gas sensor device. The NO2 gas sensor device composing of the ZnPc plasma polymer film showed a sensitivity toward NO2 gas in ranges of 100 to 1000 ppm.