화학공학소재연구정보센터
Przemysl Chemiczny, Vol.76, No.12, 521-524, 1997
Synthesis of organometallic compounds (13 group of metals) of highest purity for formation of semiconductive materials.
Methods of synthesis of organometallic compounds to produce puratronic (6N) material have been tested and selected from the point of view of their up-scaling potential. Purification of those compounds by complex salts decomposition at elevated temperatures or by vacuum transport has been proposed. Reasons of transportation of oxygen containing compounds to the reaction chamber, what is harmful to the epitaxial process, have been determined and their removal from organometallics by crystallization proposed.