This paper reports the conversion of CBD CuxS films into CuInS2 films. XRD spectra of the as-prepared CuxS films show lack of crystallinity. When pure indium is evaporated over these films and the samples are subsequently annealed, the film improves in crystallinity and shows major peaks of CuInS2. Absorption spectra and XPS depth profile of the samples support this result. (C) 2000