화학공학소재연구정보센터
Science, Vol.266, No.5188, 1213-1215, 1994
Ultrahigh-Resolution X-Ray Tomography
Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by similar to 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of similar to 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to similar to 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of similar to 1000 angstroms.