High-efficiency CdS/CdTe solar cells with thin CdS film have recently been developed. Semiconductive layers of CdS via the CVD method and of CdTe via the CSS method were deposited on an ITO/# 7059 substrate. Cell performance depends primarily on the thickness of CdS film, and the conversion efficiency is highest for a CdS film thickness of around 60 nm. Since the CdS film thickness decreases by about 30% during deposition of the CdTe layer, a thickness of 95 nm is required to obtain a 60 nm-thick CdS film after deposition of a CdTe layer. By observing the CdS film during the CdTe deposition process, a decrease was detected before CdTe layer completely covers the surface of the CdS film. By optimizing the thickness of CdS film, an efficiency of 15.12% for the best cell under AM 1.5 verified at JQA was obtained. This fabrication process has good reproducibility; 92.5% of 1 cm(2) solar cells fabricated under the same conditions have efficiencies above 14%.