The annealing effect of an evaporated Cu2Te-Au contact to CdTe film on the photovoltaic properties of thin-film CdS/vacuum-evaporated CdTe solar cells has been investigated. V-oc and J(sc) for the cells with Cu2Te-Au contact increased greatly with increasing annealing temperature and showed a maximum value at around 250. Photovoltaic properties of the cell with Cu2Te-Au contact were improved by annealing in a greater extent than those of the cell with Te-Au or Te-Cu contacts. The cells with Cu2Te-Au contact exhibit a higher conversion efficiency, comparing with the cells with Te-Au or Te-Cu contacts. The cell with Cu2Te-Au contact showed a conversion efficiency of 10%. Cu2Te-Au contact acts as the best pseudo-ohmic contact on vacuum evaporated CdTe film.