CuInSe2 films have been prepared using the selenization technique. Preparation of the precursor as well as selenization were carried out by the vacuum evaporation technique. The sequence of copper and Indium layer deposition during precursor preparation affects the morphological and structural properties of precursor which directly have effects on the properties of selenized CIS films. A thin layer of amorphous selenium at the substrate/film interface has been used to improve the adherence of the film. The effect of the Se under-layer has been studied on the layers of copper, indium, CuIn precursors and CIS films, using structural, morphological and optical properties. The surface morphology of a single layer of copper and indium, with and without the Selenium under-layer, are quite different and drastically affect the properties of the precursor and selenized films. The Se under-layer does not take part in the chemical reaction of CIS formation during the selenization process. The modified CIS films are uniform, single phase, polycrystalline, chalcopyrite with (1 1 2)preferred orientation showing an energy band gap of 0.99 eV and an absorption coefficient of similar to 10(5) cm(-1), and have good adherence to the substrate for the scotch tape test.