ZnO/CdS/CIS solar cell structures have been made by using different deposition techniques for each layer: standard rf-magnetron sputtering and chemical bath deposition for ZnO and CdS, respectively, and direct electrodeposition for CIS as a low-cost alternative to the coevaporated absorber. Chemical studies of ZnO, CdS and CIS films, ZnO-CdS and CdS-CIS bilayers, and ZnO-CdS-CIS cells have been performed by utilising XPS. No chemical reactions were detected in the interfaces. Photovoltaic quality was evaluated from the spectral response data.