LiCoO2 thin films for cathodes in rechargeable lithium batteries were prepared by the electrostatic spray pyrolysis technique. The surface morphology may be either dense or porous, depending on the process conditions. Low temperature (280 degrees C) results in amorphous films. Deposition at a temperature higher than 340 degrees C results in the hexagonal phase of LiCoO2. The lithium chemical diffusion coefficients of these films range between 10(-13) and 10(-12) cm(2)/s.