화학공학소재연구정보센터
Solid State Ionics, Vol.82, No.3-4, 173-178, 1995
Microscopic Study of the Beta"-Al2O3 Single-Crystal-Film Growth-Mechanism on Sapphire Substrates
The microstructure of beta "-Al2O3 single-crystal films grown on sapphire substrates has been studied. A film-growth mechanism based on beta "-Al2O3 formation and crystal incorporation is suggested.