A possibility of the lithium vanadium silicate film for the use of lithium cells is studied by making cells with WO3-x, MnO2-x and MoO3-x cathode thin films. The solid electrolyte of lithium vanadium silicate is deposited on the cathode film, MnO followed by lithium deposition on the electrolyte by vacuum evaporation. The stable capacities of WO3-x, MnO2-x and MoO3-x cells are about 10, 15 and 60 mu Ah/cm(2), respectively. Among them, the Li/MoO3-x cell shows the best capacity and the best cycles of more than 250 cycles in its cycling life. The cell shows a larger capacity at charge than at discharge, caused by self-discharge. We believe that the self-discharge can be improved by a film formation which has a lower electronic conductivity, like the bulk material.