Proton conducting thin films of SrZrO3 and SrCeO3 were fabricated by the pulsed laser ablation method using ArF excimer laser. The thin films of SrCeO3 and SrZrO3 were grown in the [100] direction on the SrTiO3(100) substrate and in the [211] direction on the MgO(100) substrate and on the Al2O3 substrate. The Raman scattering spectra show that the thin films grown in the low P-o2 contain lots of oxygen ion vacancies compared to bulk crystals.