Molybdenum oxide thin films have been used in microbatteries and other ionic devices. This paper reports the preparation of MoO3 by electron beam evaporation technique. The films were deposited onto glass substrates at temperatures in the range of 100-250 degrees C. The films were characterized by studying their structure, electrical and optical properties. The films formed at 100 degrees C are amorphous with conductivity of about 2.5 x 10(-5) Omega(-1) cm(-1). The absorption spectrum of MoO3 doped with LiO2 varies with dopant which suggests that MoO3 is suitable for electrochromic films. The effect of deposition temperature on the optical and electrical properties of the films are discussed.