화학공학소재연구정보센터
Thin Solid Films, Vol.237, No.1-2, 112-117, 1994
The Effect of Substrate-Temperature on the Properties of Sputtered Tin Oxide-Films
Tin oxide thin films have been deposited on glass substrates by the d.c. reactive magnetron sputtering method. The dependence of electrical, structural and optical properties of films on the substrate temperature was studied. The single-oscillator model was used to fit the dispersion of the refractive index with the wavelength. Rayleigh-type scattering was assumed for explaining the variation of the transmittance.