PbTiO3 films prepared by metalorganic decomposition process were analyzed by X-ray diffraction, TEM and Auger electron spectroscopy. The film on SrTiO3 substrate is highly c-axis oriented : the grains are columnar with their longer axes perpendicular to the film surface. The grain size calculated by X-ray diffraction is much smaller than that observed from TEM. The Auger energies of Pb, Ti and O on the film surface are higher than those from within the film. The surface layer of the film is non-stoichiometric, with excessive Pb and insufficient O and Ti. The thicknesses of the surface layer and the film-substrate interface layer increase with firing temperature.