Films on the condensation plane were obtained by evaporation of glassy As,Se, and polycrystalline Yb from two furnaces 10 cm apart. The phase formation before and after annealing was investigated by high energy electron diffraction. Films of YbAs2Se4, YbAs4Se7 and YbBsSe(3) have been obtained. Their crystallographic data and the obtaining regimes of each mentioned phase were established. It was discovered that the obtained phases are formed in the film state at much lower temperatures than those in the bulk samples.