Thin Solid Films, Vol.238, No.2, 276-279, 1994
Selective Laser Oxidation of Thin Metal-Film as an Effect of Different Thermal Regimes
We report the synthesis of oxides of various compositions and structures within the same irradiation site as an effect of different thermal regimes. Experimental evidence from electron microscopy investigations is provided for chromium films supported on copper grids and submitted to excimer laser (lambda = 308 nm) treatment in ambient air. The results are found to be in good accordance with the predictions of our numerical analysis.