화학공학소재연구정보센터
Thin Solid Films, Vol.241, No.1-2, 30-33, 1994
TiNx Magnetron Sputter Coating Controlled by an in-Situ Eddy-Current Sensor
The quality of magnetron-sputtered TiN(x) coatings can vary significantly. The reasons for this must be sought in the coating process parameters and substrate conditions. A sensor developed for controlling in situ the coating parameters during the coating process should be a good tool for direct quality control and better process regulation. The construction of an eddy current sensor and measurement results will be discussed.