The microstructure, mechanical properties and microhardness of Mo-N films deposited on stainless steel are studied in detail. X-ray and electron diffraction studies show that the films consist of a polycrystalline gamma-Mo2N phase. The microstructure was found to be independent of the type of substrate, stainless steel, silicon and glass used for deposition. The microhardness of the films was found to be 23.1 +/- 1.5 GPa, indicating that they may be used as hard protective coatings.