Thin Solid Films, Vol.250, No.1-2, 37-41, 1994
Surface Strains and Measurements of Misfit Dislocation Density by Diffraction Methods in Thin-Films on Substrates
In-plane strain variations near the free surface of an epitaxial thin film containing misfit dislocations have been calculated. It is shown that strain distribution under the surface of the film is not constant and this distribution also depends on film thickness even for constant misfit dislocation density. The strain derived from diffraction measurements must therefore be corrected to obtain the true misfit dislocation density.