화학공학소재연구정보센터
Thin Solid Films, Vol.253, No.1-2, 508-512, 1994
Realistic Electromigration Lifetime Projection of VLSI Interconnects
Tungsten plug contacts/vias electromigration experiments have been performed using a variety of test structures under different stress conditions. It was found that electromigration failures, failure mechanisms of tungsten plug contacts/vias, were strongly influenced by the test structures and stress conditions. This paper discusses the effect of test structures and stress conditions on electromigration failure for realistic lifetime projection of VLSI interconnects.