화학공학소재연구정보센터
Thin Solid Films, Vol.256, No.1-2, 44-47, 1995
Structural Studies of Reactively Sputtered Carbon Nitride Thin-Films
The structure of reactively sputtered carbon nitride thin films has been investigated using infrared, Raman and X-ray photoelectron spectroscopies. The presence of infrared and Raman active C-N vibrational bands and the chemical shifts of the C Is and N Is photoelectron levels observed in our films reveal that the nitrogen atoms incorporated in the films are chemically bonded to the carbon atoms.