Thin Solid Films, Vol.256, No.1-2, 68-72, 1995
Catalytic Properties of Thin-Films by Simultaneous Oblique Sputter-Deposition of 2 Materials from Different Directions
Catalytic properties of simultaneously obliquely sputter-deposited platinum-metal oxide thin films were studied. We attempted to study the effect of combination of the metal oxide with platinum on the NO-CO reaction by minimizing differences in the particle size and the dispersion of platinum in the samples. Simultaneously obliquely sputter-deposited Pt-metal oxide thin film systems gave comparable particle sizes and dispersion of platinum in different combinations of several metal oxides with platinum. The catalytic property of platinum was changed by the choice of metal oxide. We found this simultaneous oblique sputter deposition to be an excellent technique for obtaining a model catalyst suitable for exploring the synergistic catalytic reaction and the role of promoters at the interfaces of different materials, which facilitates the survey of industrial catalysts.