Atomic force microscopy was used to study the microstructure and nanostructure of sputtered and evaporated columnar thin films. The atomic force microscope was shown to be a useful tool for studying the surface topography of these technologically interesting surfaces. Two structure zone transitions were studied : the substrate-temperature dependent, zone 2 to zone 3 transition and the sputter-pressure dependent zone 1 to T transition. Columns of zone 1 films were found to occur in a number of different shapes; rounded domed columns, elongated rounded columns, and faceted columns. The differences in the column shape are attributed to differences in preferred growth directions and anisotropic adatom sticking coefficients. It was also found that the surfaces of the columns also contained structure. The form of these structures varied depending on the material. In many films, the surface of the columns was smooth, while in a few films the surface of the individual columns contained significant texture. For example, the surface of a TI-W thin film consisted of corrugations less than 10 Angstrom high. The corrugations were between 100 and 200 Angstrom apart. Finally, the effect of the tip shape on the AFM images presented in this paper is discussed.