SrTiO3 thin films were prepared by aerosol metal-organic chemical vapour deposition on (001) MgO, R-plane Al2O3 and (001) Si single-crystal substrates. Strontium tetramethyl heptadionate and titanium n-butoxide dissolved in diethyleneglycol dimethyl ether were used as precursors. The structure of the films was investigated by X-ray diffraction and transmission electron microscopy. Epitaxial films with [001] and [111] orientation perpendicular to the substrate surface were obtained on MgO and Al2O3, respectively. The epitaxial films on the MgO substrate were found to be in a relaxed state with lattice parameters corresponding to the bulk values. SrTiO3 films on the Si substrate were grown as highly textured in the [011] direction and randomly oriented in the plane parrallel to the substrate surface.