TiN and TiC films were deposited by activated reactive evaporation using a hollow cathode discharge. Their tribological properties were studied by the ring-on-disc tribotester. The rubbed surface of the disc samples was observed by scanning electron microscopy, and their roughness profile was measured by the SOLANDEKTAK II roughness tester. The friction coefficient was about 0.14 for the wear couple of the TiN-coated ring against the TiC-coated disc in air at room temperature, and the wear couple also showed excellent wear resistance. The friction coefficient decreased with the increase of temperature for the wear couple of the TiN-coated ring against the TiC-coated disc in a vacuum of pressure 2.6 x 10(-3) Pa at temperatures up to 623 K, and the wear trace of the disc samples was very light for 10 min at 673 K after the friction surface of the weak couple was ground in for 5 min at 473 K and for 5 min at 623 K, in a vacuum of pressure 2.6 x 10(-3) Pa.