The morphology and microstructure of evaporated CuInS2 films is investigated with the emphasis on the effect of stoichiometry deviations. The compositions of In-rich and Cu-rich films obey the relations In2S3-CuInS2 and CuS-CuInS2 in the ternary phase diagram, respectively. In-rich films exhibit a platelet-like grain structure. This morphology can be explained by the formation of twin dislocations. Cu-rich films show a textured morphology with grain sizes in the range of 1-4 mu m.