Single-Source MOVPE Growth of Zinc-Sulfide Thin-Films Using Zinc Dithiocarbamate Complexes

Nomura R; Murai T; Toyosaki T; Matsuda H

Thin Solid Films, Vol.271, No.1-2, 4-7, 1995

DOI10.1016/0040-6090(95)08147-X Export Citation

Single-Source MOVPE Growth of Zinc-Sulfide Thin-Films Using Zinc Dithiocarbamate Complexes

Nomura R, Murai T, Toyosaki T, Matsuda H

(111)-Oriented cubic zinc sulfide (ZnS) thin layer was grown on an Si(111) substrate by MOVPE using zinc bis(diethyldithiocarbamate) (Zn(S(2)CNEt(2))(2)).

Keywords:CHEMICAL VAPOR-DEPOSITION;PRECURSORS;CADMIUM;ZNS