Epitaxial Fe films with the (110) orientation were deposited on a CaF2(111) buffer layer on Si(111) substrates. The structural characterization of the epitaxial films included conventional and grazing angle X-ray diffraction experiments, rocking curve crystal quality analysis, X-scans as well as scanning electron microscopy. The results show the increasing quality of the Fe films with substrate temperature during deposition. We discuss the crystal quality and the orientational relationships of the Fe(110)/CaF2(111)/Si(111) system as compared with the Fe(222)/Si(111) system.