Thin Solid Films, Vol.277, No.1-2, 79-82, 1996
Deposition of BN Coatings by Spraying a Powder Accelerated Electrodynamically in a Coaxial Pulse Plasma Generator
Coatings of boron nitride were deposited by spraying a h-BN powder accelerated electrodynamically in a coaxial pulse plasma generator. The coatings were deposited on non-heated silicon substrates, which were, however, heated by the pulse plasma itself. The phase identification performed in this experiment has shown that, under the conditions prevailing during the deposition process, the h-BN powder underwent transformation to form the metastable E-BN phase.
Keywords:BORON-NITRIDE;WURTZITE-TYPE