화학공학소재연구정보센터
Thin Solid Films, Vol.280, No.1-2, 112-114, 1996
New Lacu0.5Mn0.5O3 Thin-Films Deposited by the Sol-Gel Process on Different Substrates
LaCu0.5Mn0.5O3 thin films (100-200 nm) have been deposited on ceramic Al2O3 and ZrO2, glass ceramic and [101] single-crystal quartz, using the sol-gel process. It was found in all cases that the films are polycrystalline and single phase without preferred orientation. The morphology of the films depends strongly on the nature of the substrate. The films deposited on Al2O3 exhibit morphological characteristics making them suitable as possible sensors and catalysts.