화학공학소재연구정보센터
Thin Solid Films, Vol.287, No.1-2, 32-35, 1996
Preparation of YBa2Cu3Ox Superconducting Thin-Films via Combustion Chemical-Vapor-Deposition
YBa2Cu3Ox (YBCO) thin films were prepared by combustion chemical vapor deposition. As-deposited films on single-crystal (100) MgO substrates showed highly oriented c-axis up-growth and displayed the onset of a superconducting transition at 84 K with zero resistance obtained at 78 K after annealing in pure oxygen. Pole figures of the YBCO films on (100) MgO showed two in-plane alignment orientations of the film with respect to the substrate. The YBCO [100] and [110] were aligned with the MgO [100]. YBCO films were also deposited on roll-textured polycrystalline silver at temperatures between 1120-1220 K and di splayed c axis up-growth. The rolling texture of silver was not strong enough to induce detectable in-plane preferential growth of the YBCO. Metal nitrate salt solution compositions differed from oxide film compositions. To obtain a film composition of near 1:2:3 on MgO, a solution composition of 1:1:0.9 was necessary.