화학공학소재연구정보센터
Thin Solid Films, Vol.290-291, 13-17, 1996
CdS Thin-Film Deposition by CW Nd-YAG Laser
We report cumulative results on CW Nd:YAG laser deposition of CdS thin films. Films are characterized by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis, transmission electron microscopy, ultraviolet through visible light transmission, and Raman measurements. Films deposited at 400 degrees C or higher manifest a pure hexagonal CdS phase, and films deposited at 200 degrees C or lower contain both cubic and hexagonal phases.