By using a low pressure mercury lamp as an excitation source, vapor deposition polymerization (VDP) of N-vinylcarbazole was carried out. Deposition and annealing processes were observed with real-time in situ Fourier transform IR reflection absorption spectroscopy. On average, the him deposited at the substrate temperature of 255-275 K consisted of 65% of an isotropic component and 35% of an oriented component. A polymer yield of 95% film was obtained at a substrate temperature of 275 K. The same yield was achieved at an annealing temperature of around 350 K when the VDP film deposited at 255 K was annealed in vacuum.