화학공학소재연구정보센터
Thin Solid Films, Vol.294, No.1-2, 311-314, 1997
Dislocation Patterning - A New Tool for Spatial Manipulation of Ge Islands
The ability of dislocation patterns to control the lateral distribution of islands on the surface of strained heteroepitaxial systems is elucidated. We have studied the behaviour of Ge deposited on a Si surface modified by misfit dislocations generated in buried compositionally graded Si1-xGex layers. A pronounced ordering of the Ge islands on the dislocation-structured substrates is revealed, It is shown that this striking phenomenon is caused by the inhomogeneous surface-strain patterns associated with the misfit dislocations. The results open a new pathway to spatial manipulation of zero-dimensional structures in heteroepitaxial semiconductor systems.