화학공학소재연구정보센터
Thin Solid Films, Vol.295, No.1-2, 125-130, 1997
On the Conduction Mechanism in Plasma-Polymerized M-Xylene Thin
Plasma polymerized m-xylene (PPm-X) thin films were deposited using a capacitively coupled glow discharge reactor. The structural analysis was done by infrared (IR) spectroscopy. The current-voltage (I-V) characteristics of the PPm-X thin films were investigated at different temperatures and different thicknesses. The IR analysis reveals that the structure of the PPm-X thin films is different from that of the monomer liquid m-xylene. The nonlinear I-V characteristics were analyzed following three different mechanisms of carrier conduction. It is seen that Poole-Frenkel conduction mechanism is most probable in PPm-X thin films.