Thin conducting cadmium oxide (CdO) films were fabricated from Langmuir-Blodgett Cd arachidate precursors through a combination of low temperature ultra-violet/ozone (UVO) decomposition and annealing treatments. The decomposition and oxidation of the UVO residue to CdO occurred between 220 to 300 degrees C, and was observed using in-situ laser reflectivity and resistivity measurements. The final CdO film resistivities were in the 10(4)-10(5) Omega/square range, depending on annealing conditions. Atomic force microscopy revealed nanometre-scale surface roughness in the final film, which most likely resulted in the lower conductivity measured in the film as compared to bulk CdO fabrication techniques.