화학공학소재연구정보센터
Thin Solid Films, Vol.299, No.1-2, 53-58, 1997
Charge Injection in SrTiO3 Thin-Films
The leakage current behaviour of SrTiO3 thin films was investigated. The commonly reported Schottky emission regime is extended towards low fields for which an ohmic and a saturation regime is found. In addition, the deviation from the Schottky effect towards high fields is explained by applying a more general injection law which is valid over all temperatures and fields and which includes the Schottky approximation as a special case. From this general injection law, the width of the Schottky depletion layer is obtained unambiguously showing that the film is completely depleted.