화학공학소재연구정보센터
Thin Solid Films, Vol.300, No.1-2, 295-298, 1997
Determination of Hydrogen Absorption in Pd Coated Al Thin-Films
Al films, 80-85 nm in thickness and 10-30 mu Omega cm in resistivity, are coated with Pd(8-40 nm). The bilayer is exposed to a hydrogen atmosphere of up to 4.0 kPa. The hydrogen concentration is calculated from the frequency change in a quartz crystal microbalance and the electrical resistance of the Pd film, the Al film and the bilayer is measured as function of hydrogen pressure. Concentration and resistance measurements indicate that the Pd coating enables the Al films to absorb hydrogen from the gas phase.